×
Manifold Valves
Dymatrix® Specialty Integrated Valves (AVSIV)
Application specific solutions engineered to meet unique design challenges. In collaboration with end-users, Asahi can integrate any combination of Dymatrix® components onto a single hybrid valve body. These multi-function valves provide a compact solution, eliminating multiple connections and possible leak points.
Resources:
Data Sheet
Ideal Applications Include:
CMP, Electrochemical Deposition – ECD, Photolithography, Chemical Delivery Systems, Spin Coating, Wet Bench Cleaning
Specifications:
Materials of Construction:
Wetted Valve Body (PTFE), Actuators (PFA or PVDF)
Flow Rate:
Various
Flow Configuration:
Various
Actuation:
Manual, Pneumatic, Hybrid (Multi-turn Push-to-lock)
Connection Types:
Flare, S300, Super Pillar, Tube, Rc, Flowell 20 and 60 series
- Compact Monolithic Design
- Eliminate dead legs
- Ultra-high purity, corrosion resistant PTFE and PFA wetted components
- Full customized to application specific needs
- Reduced connections and possible leak points
- Lower installation costs
- Configurable mounting orientation
- O-Rings: FKM, EPDM, Viflon F, Kalrez®
- Fluoropolymer coated stainless steel hardware