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Dymatrix® PFA/PTFE Valves
Flow Control Valves
Asahi/America’s patented Ultrasonic Flow Meter Technology and Dymatrix® pinch valves make Falconics™ the ultimate choice for flow control of CMP slurry. Our ultrasonic technology creates a directionally concentrated and repeatable flow signal despite bubbles and temperature fluctuations. Asahi’s proven Dymatrix® pinch valve offers the most durable and reliable valve for aggressive slurry. Together, these features provide highly accurate control and fast response times, which generates a strong ROI.
Specifications:
Flow Ranges:
50 – 500 mL/min
25 – 250 mL/min
Accuracy:
3% S.P.
Repeatability:
1.5% S.P.
Response time:
< 3.0 sec
Shut off speed:
< 3.0 sec
Operating Pressure:
14.5 – 43.5psi
Flush Pressure*:
80 psi
Medium Temperature:
59 – 95° F (15 – 35° C)
End Connections:
1/4” Flare or S300
Voltage:
24 VDC
Current Draw:
0.4 Amp
Output Signals:
4-20mA, 0-5V, 0-10V
Signal Connection:
RS 485
Purge Flow Rate:
20 L/min (ANR)
Purge Connector:
5/32” OD
- Fast and accurate flow control reduces waste
- Ultrasonic technology generates precision
- Straight flow path prevents slurry clogging
- Dymatrix™ pinch valve provides long life