AVHPRL

Pneumatic Pressure Regulator

We designed pressure regulators to provide precisely accurate and highly stable control of pressure fluctuations for flow control applications. The HPRL is utilized for UPW and chemicals and provides full shutoff. The internal structure of the HPRM prevents clogging and cohesion in CMP slurry applications. Both models are pneumatically controlled.

Resources

• HPRL Data Sheet