Asahi’s patented Ultrasonic Flow Meter Technology and Dymatrix™ Pinch Valves make Falconics™ the ultimate choice for flow control of CMP slurry. Our Ultrasonic Technology creates a directionally concentrated and repeatable flow signal despite bubbles and temperature fluctuations. Asahi’s proven Dymatrix™ Pinch Valve offers the most durable and reliable valve for aggressive slurry. Together these features provide highly accurate control and fast response times, which generates a strong ROI. Flow Ranges | 50 - 500 mL/min | | 25 - 250 mL/min | Accuracy | 3% S.P. | Repeatability | 1.5% S.P. | Response time | < 3.0 sec | Shut off speed | < 3.0 sec | | | Operating Pressure | 14.5 – 43.5 psi | Flush Pressure* | 80 psi | Medium Temperature | 59 – 95 F (15 - 35 C) | End Connection | 1/4” Flare or S300 | | | Voltage | 24 V DC | Current Draw | 0.4 A | Output Signals | 4-20mA, 0-5V, 0-10V | Signal Connection | RS 485 | | | Purge Flow Rate | 20 L/min (ANR) | Purge Connector | 5/32” OD |
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