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Flow Control Valves - FalconicsTM 

Flow Control for CMP Slurry

Resources

 

 

  • Fast and accurate flow control reduces waste
  • Ultrasonic Technology generates precision
  • Straight flow path prevents slurry clogging
  • Dymatrix™ Pinch Valve provides long life

Asahi’s patented Ultrasonic Flow Meter Technology and Dymatrix™ Pinch Valves make Falconics™ the ultimate choice for flow control of CMP slurry. Our Ultrasonic Technology creates a directionally concentrated and repeatable flow signal despite bubbles and temperature fluctuations. Asahi’s proven Dymatrix™ Pinch Valve offers the most durable and reliable valve for aggressive slurry. Together these features provide highly accurate control and fast response times, which generates a strong ROI.

Specifications

Flow Ranges

50 - 500 mL/min

25 - 250 mL/min

Accuracy

3% S.P.

Repeatability

1.5% S.P.

Response time

< 3.0 sec

Shut off speed

< 3.0 sec

Operating Pressure

14.5 – 43.5 psi

Flush Pressure*

80 psi

Medium Temperature

59 – 95 F (15 - 35 C)

End Connection

1/4” Flare or S300

Voltage

24 V DC

Current Draw

0.4 A

Output Signals

4-20mA, 0-5V, 0-10V

Signal Connection

RS 485

Purge Flow Rate

20 L/min (ANR)

Purge Connector

5/32” OD